Temperature Measurement during Millisecond Annealing: Ripple Pyrometry for Flash Lamp Annealers
Denise Reichel (auth.)Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the method’s suitability for background-corrected temperature measurement. The experimental results finally proof its power for elevated temperatures.
카테고리:
년:
2015
판:
1
출판사:
Springer
언어:
english
페이지:
128
ISBN 10:
365811388X
ISBN 13:
9783658113889
시리즈:
MatWerk
파일:
PDF, 4.74 MB
IPFS:
,
english, 2015
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